Coating Equipment for Transparent Parts
Product Introduction
This equipment is designed for preparing surface coatings on both organic and inorganic glass, allowing for the deposition of ITO thin films and anti-reflective films that ensure excellent electrical conductivity and light transmittance. Equipped with versatile systems such as direct current, intermediate frequency, radio frequency, ion power supplies, and High-Power Impulse Magnetron Sputtering (HiPIMS) systems, it offers customizable configurations to meet specific technological applications. Given the limited heat resistance of organic glass, specialized heating systems, including infrared and thermal radiation heaters, are provided, with precise temperature controls to ensure optimal processing conditions.
Key Features
Superior Film Layer Uniformity: Ensures consistent quality across the coated surface.
Adaptable Profiling Motion: Tailored to accommodate various product structures effectively.
Precise Control of Film Layer Performance: Allows for meticulous adjustments to meet specific application requirements.
Key Specs
Device Model | SP-1000SI | SP-1200SI | SP-1500SI | SP-1800SI |
Vacuum Chamber Size (mm) | 1000×1000 | 1200×1200 | 1500×1500 | 1800×1800 |
Maximum vacuum | 5.0E-4Pa | |||
Air Extraction time | Ambient Pressure to 5.0E-3Pa in less than 20 minutes | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Dry screw pump + Oil-free Roots Pump + Magnetic levitation molecular pump | |||
Heating System | Infrared heaters with zoned temperature control. The temperature can be controlled and adjusted from room temperature to 400℃. | |||
Air Injection System | Mass flow controller(1-6 set) | |||
Target | Planar target、Pillar Sputtering Target | |||
Power Supply | MF Power Supply、DC Power Supply、RF Power Supply、Hipims | |||
Workpiece Rotation Method | Profile-following motion/Reciprocating oscillation/Rotational motion linked with the target. | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
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