DC Magnetron Sputtering Power Supply
Product Introduction
The high-frequency inverter output mode is expertly matched with the sputtering target, ensuring optimal performance and efficiency. Power Configuration Power Supply: Includes a 3m input power cord. Optional Configuration: Features a set of interlocking protection devices for enhanced safety.
Key Features
Multi-Dimensional Adjustments: Enhances the uniformity and bonding strength of the multilateral membrane layer through changes in target and ion sources.
Closed-Loop Control System: Improves coating uniformity with precise feedback mechanisms.
Seamless Operation: Increases productivity by facilitating efficient and uninterrupted workflows.
Key Specs
Device Model | SP3M5 | SP6M10 | SP20M30 | SP30M45 |
Power | 3KW | 6KW | 20KW | 30KW |
No-load voltage | 1200V | 1200V | 1200V | 1200V |
Operating voltage | 200-600V | 200-600V | 200-600V | 200-600V |
Operating current | 5A | 10A | 30A | 45A |
Size(mm) | 610×480×280 | 610×480×281 | 610×480×282 | 610×480×283 |
Cooling Method | Water cooling | Water cooling | Water cooling | Water cooling |
Type | Normal | Normal | Normal | Normal |
Note | Special demand can be fully customized | |||
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