MF AC Magnetron Sputtering Power Supply
Product Introduction
The MF AC magnetron sputtering power supply offers efficient and rapid arc extinguishing while fully satisfying power requirements. It includes robust protection and display functions for undervoltage, overvoltage, overload, and overheating. The power supply supports dual target operation, enabling sputtering of non-conductive targets, increasing ionization rates, and effectively addressing target poisoning and abnormal discharge. Power Configuration Power Supply: Comes with a 3m input power cord. Optional Configuration: Features a set of interlocking protection devices for enhanced safety.
Key Features
Multi-Dimensional Adjustments: Enhances the uniformity and binding strength of the multilateral membrane layer through targeted and ion source modifications.
Closed-Loop Control System: Ensures improved coating uniformity with precise feedback control.
Seamless Operation: Boosts productivity by enabling efficient and uninterrupted production workflows.
Key Specs
Device model | SP20MB815 | SP30MB830 | SP40MB845 | SP108MB1014 |
Power | 20KW | 30KW | 40KW | 108KW |
No-load voltage | 1000V | 1000V | 1000V | 1500V |
Operating Voltage | 80-800V | 80-800V | 80-800V | 100-1000V |
Operating current | 15A | 30A | 45A | 144A |
Frequency | 40kHz | 40kHz | 40kHz | 40kHz |
Size(mm) | 610×480×280 | 610×480×280 | 750×480×310 | 800×600×1800 |
Cooling method | Water cooling | Water cooling | Water cooling | Water cooling |
Type | Normal | Normal | Normal | Normal |
Note | Special demand can be fully customized | |||
Get In Touch
For partnerships, product inquiries, or technical guidance, our team is here to support you every step of the way.
Reach out to us for expert advice, reliable support, and tailored PVD solutions that move your business forward.