Mini/Micro-LED Display Coating Equipment
Product Introduction
Our PVD coating production line enables the application of copper coatings on multiple sides of glass substrates and display panels, utilizing advanced PVD technology for superior performance.
Key Features
Flexible Configuration: Tailored to meet specific production requirements.
Closed Loop Control Logic: Enhances coating uniformity.
Seamless Operation: Increases overall productivity.
Optimized Magnetic Configuration: Ensures excellent uniformity and material utilization.
Key Specs
Device Model | SP-0606SI-LH | SP-1112S-LH |
Vacuum Chamber Size (mm) | 9000×700 | 15000×1100 |
Maximum Vacuum | 3.0E-4Pa | |
Pressure Rise Rate | 1h≤0.4Pa | |
Vacuum Pump Set | Mechanical pump, Roots pump, Molecular pump, Cryopump | |
Heating System | Room temperature to 300 ℃ | |
Air Injection System | Mass flow controller | |
Sputtering Target | Rotating Cathode, Planar Sputtering Target, Polygonal Sputtering Target | |
Power Supply | DC Sputtering Power Supply, lon Power Supply | |
Workpiece Moving Method | Step(pass in one), Servo stepless speed regulation | |
control mode | Manual+semi-automatic+fully automatic integrated+PLC+IPC | |
Remote docking | MES | |
External Access Points | Automatic loading and unloading device | |
Get In Touch
For partnerships, product inquiries, or technical guidance, our team is here to support you every step of the way.
Reach out to us for expert advice, reliable support, and tailored PVD solutions that move your business forward.