Scientific Research Coating Equipment
Product Introduction
Our scientific research coating equipment features an aesthetically pleasing design, compact structure, and versatile performance, ensuring simple and reliable operation with low power consumption. It supports a range of coating processes, including evaporation coating, magnetron sputtering, HiPIMS, RF, arc coating, CVD, and PECVD. The system can be operated manually, semi-automatically, or fully automatically, offering various sizes and models to meet diverse application needs.
Key Features
Flexible Function Combination: Functions can be easily integrated to suit specific requirements.
Customized Production: Tailored solutions are available in collaboration with users to meet experimental needs.
Diverse Process Programming: Supports a variety of programming options for different coating processes.
Joint Experimental Development Services: We offer collaborative services to enhance experimental development.
Key Specs
Device Model | SP-0305AS | SP-0506AS | SP-0608ASI | SP-1005ASI |
Vacuum Chamber Size (mm) | 300×500 | 500×600 | 600×800 | 1000×500 |
Extreme Vacuum | 6.0E-5Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 10 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump, Roots pump, Molecular pump, Maintaining pump | |||
Heating System | Room temperature to 500℃ (PID controlled) | |||
Air Injection System | Mass flow controller (1-4 set) | |||
Targets | Inductive coupled ionization, Electric Beam Evaporation | |||
Power Supply | Inductive Heating Power Supply， Electric Gun Power Supply,MF Sputtering Power Supply, HiPIMS Power Supply, Arc Power Supply, Bias Power Supply, DC Sputtering Power Supply, Radio Frequency Power Supply | |||
Workpiece Rotation Method | Revolution+rotation frequency conversion infinite speed regulation | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
Get In Touch
For partnerships, product inquiries, or technical guidance, our team is here to support you every step of the way.
Reach out to us for expert advice, reliable support, and tailored PVD solutions that move your business forward.