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Thin Film Battery Conductive Coating Equipment

Celli Roll-to-Roll (R2R) PVD Coating System for Flexible Substrates

Product Introduction

Our high-molecular film winding type double-sided copper foil vacuum coating equipment utilizes advanced vacuum vapor deposition technology to efficiently coat double-sided 30 mΩ copper foil in a single working cycle. It also supports high-speed plating of double-sided 500 mΩ copper foil while enabling the creation of various composite coatings in one process. The system produces a “metal conductive layer - polymer support layer - metal conductive layer” sandwich composite structure by plating conductive coatings on both sides simultaneously. The rapid plating of 30 mΩ copper foil eliminates the need for subsequent electroplating, addressing potential environmental issues. Additionally, our proprietary high-energy cleaning and activation technology enhances the bonding force between the metal layer and the polymer layer. With the same one-sided sheet resistance standard, our products can reduce copper foil thickness by 70%, significantly decreasing the weight of batteries.

Key Features

  • Single Film Formation: Achieves efficient and uniform coating in one process.

  • Low Copper Foil Resistance: Ensures copper foil coating resistance is less than 30 mΩ.

  • Eco-Friendly Operation: Environmentally friendly and pollution-free, minimizing environmental impact.

Key Specs

Device Model

SP-650SI

SP-1300SI

SP-1650ASI 

Vacuum Chamber size (mm)

650

1300

1650

Maxlum vacuum

6.0E-4Pa

Pressure Rise Rate

1h≤0.5Pa

Vacuum Pump Set

Mechanical pump+Roots pump+Molecular pump/Cryogenic trap pump+Maintenance Pump

Heating System

Adjustable and controllable from room temperature to 300 ℃ (PID temperature control)

Air lnjection System

Mass flow controller

Substrate

Flexible substrates such as PET

Sheet Resistance

30-500mΩ

Targets

Sputtering targets, high pressure cleaning sources, etc

Power Supply

High-pressure cleaning power supply, sputtering power supply, etc.

Workpiece Rotation Method

Multi-roll double-sided composite

Operating Method

Manual+Semi-Automatic+Fully Automatic +PLC+IPC

Note

Specifications can be fully customized according to customer's product and recipe requirements


Get In Touch

For partnerships, product inquiries, or technical guidance, our team is here to support you every step of the way.

Reach out to us for expert advice, reliable support, and tailored PVD solutions that move your business forward.

Address
Unit 2A, 17/F, Glenealy Tower, No.1 Glenealy
Central, Hong Kong S.A.R
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