Unipolar Pulse Bias Power Supply
Product Introduction
Our high-frequency inverter method offers a wide range of application processes that significantly enhance film quality. This technology effectively reduces temperature rise, refines particle size, increases adhesion, and boosts deposition rates while improving film uniformity. Power Configuration Power Supply: Equipped with a 3m input power cord. Optional Configuration: Includes a set of interlocking protection devices for enhanced safety.
Key Features
Multi-Dimensional Target and Ion Source Adjustments: Enhances the uniformity and adhesion strength of the multilateral membrane layer.
Closed-Loop Control System: Improves coating uniformity through precise feedback mechanisms.
Seamless Operation: Boosts productivity by facilitating efficient workflows.
Key Specs
Device model | SP6U1520 | SP12U1540 | SP20U1570 | SP30U15100 |
Power | 6KW | 12KW | 20KW | 30KW |
No-load voltage | 1000V | 1500V | 1500V | 1500V |
Operating voltage Operating current | A：50-300V 20AB:150-600V 10AC:250-1000V 4A | A：50-300V 40AB:150-600V 20AC:250-1500V 8A | A：50-300V 70AB:150-600V 30AC:250-1500V 13A | A：50-300V 100AB:150-600V 60AC:250-1500V 20A |
Duty cycle | 5%-90% | 5%-90% | 5%-90% | 5%-90% |
Frequency | 40kHz | 40kHz | 40kHz | 40kHz |
Size(mm) | 580×440×190 | 580×440×190 | 580×440×190 | 580×440×190 |
Cooling method | Water cooling | Water cooling | Water cooling | Water cooling |
Type | routine | routine | routine | routine |
Note | Special demand can be fully customized | |||
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