Vertical Continuous Line
Product Introduction
Celli's conjoined coating equipment represents an innovative vacuum coating solution for mass production. By enabling continuous coating, this system prevents the coating chamber from exposure to the atmosphere, ensuring process stability and significantly reducing pumping time, thereby doubling production efficiency. With a simplified and optimized configuration of the vacuum unit, the energy consumption of this conjoined equipment is approximately 60% that of traditional single units for the same product quantity. This efficiency not only saves energy and reduces operational costs for enterprises but also greatly shortens the payback period on equipment investments.
Key Features
Flexible Configuration: Customizable to meet specific production requirements.
Closed-Loop Control System: Enhances coating uniformity for consistent results. Seamless Docking
Operation: Increases productivity through efficient workflows.
Optimized Magnetic Configuration: Ensures excellent uniformity and material utilization. Compatibility with
Industrial Robots: Supports automatic loading and unloading for streamlined operations.
Key Specs
Device Model | SP-1006AS-L | SP-1316AS-L | SP-1885AS-L | SP-1912ASI-L |
Vacuum Chamber Size (mm) | 1000×600 | 1300×1600 | 1800×850 | 1900×1200 |
Maximum vacuum | 6.0E-4Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 15 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump, Roots pump, Molecular pump, Maintenance pump | |||
Heating System | Room temperature to 300 ℃ (PID controlled) | |||
Air Injection System | Mass flow controller (1-8 set) | |||
Targets | Multi-Arc Target, Sputtering Target, Ion Source, Radio Frequency Target | |||
Power Supply | MF Sputtering Power Supply, HiPIMS Power Supply, Arc Power Supply, Bias Power Supply, DC Sputtering Power Supply, Radio Frequency Power Supply | |||
Workpiece Rotation Method | Vertical Planetary Movement, Linear or Reciprocating Linear | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic +PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
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